Metal Line Sheet Resistance

It is a measure of the lateral resistance through a thin square of material i e.

Metal line sheet resistance.

It is commonly used to characterize materials made by semiconductor doping metal deposition resistive paste printing and glass coating. Sheet resistance also known as surface resistance or surface resistivity is a common electrical property used to characterise thin films of conducting and semiconducting materials. The values for ρ are from crc handbook of chemistry and physics 1st student edition 1998 page f 88 and are for high purity elements at 20 c. ρ is the resistivity of the conductor in ω m.

The resistance between opposite sides of a square. Capacitance of a line without neighbors can be approximated as. Sheet resistance or surface resistivity is an important property of many materials quantifying the ability for charge to travel along uniform thin films. Examples of these processes are.

Thin narrow 3λ high density cells mid. Sheet resistance often called sheet resistivity is a measure of resistance of thin films that are nominally uniform in thickness. Compute the sheet resistance of a 0 22 µm thick cu wire in a 65 nm process. Specially etch depth is very sensitive to the change of.

L is the length in metres. The utility of sheet resistance as opposed to. Doped semiconductor regions and the resistors that are screen printed onto the substrates of thick film hybrid microcircuits. Therefore to form metal lines with the stable sheet resistance it is necessary to stabilize these variables.

Ss shet rrl w 11 the contact resistance rc can then be calculated from ohm s law. The silicide resistance rs can be calculated from the measured silicide sheet resistance rs sheet on the same wafer using one of the sheet resistance measurement techniques and silicide geometry factors the length l and the width w. The dc resistance of a conductor is calculated using the equation where. A is the cross sectional area in metres.

Modern processes use 6 10 metal layers m1. Rs 4 53 x v i.